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Used as nitride precursor - MOCVD. Precursor to Titanium nitride (TiN) thin films, chemical vapor deposition (CVD). A novel templated non-hydrolytic sol-gel synthesis of titanosilicate xerogels is reported. Acetamide elimination from silicon acetate and titanium diethylamide allows obtaining titanosilicates with a high content of Si-O-Ti bonds but low surface areas. Metal-organic chemical vapor deposition (MOCVD) of TiN thin films at low temperatures and low pressures using tetrakis(diethylamino) Ti (TDEAT) and NH3 is described. TDEAT dissociatively chemisorbs on SiO2 at room temperature or above, resulting in Ti?N bond scission, and Ti?O bond formation.
J Tong, N Magtoto,; J Kelber. Tetrakis(diethylamido) titanium (TDEAT) interactions with SiO2 and Cu substrates. Applied Surface Science. year of publication , 220 (1-4), 203-216.
T.S. Cale,; M.B. Chaara,; G.B. Raupp,; I.J. Raaijmakers. Kinetics and conformality of TiN films from TDEAT and ammonia. Thin Solid Films. 1993, 236(1-2), 294-300.
Hazard Statements: H225-H315-H319-H335
Highly flammable liquid and vapour. Causes skin irritation. Causes serious eye irritation. May cause respiratory irritation.
Precautionary Statements: P210-P233-P235-P240-P241-P242-P243-P264b-P271-P280-P303+P361+P353-P304+P340-P305+P351+P338-P312-P332+P313-P363-P370+P378q-P501c
Keep away from heat/sparks/open flames/hot surfaces. - No smoking. Keep container tightly closed. Keep cool. Ground/bond container and receiving equipment. Use explosion-proof electrical/ventilating/lighting/ equipment. Use only non-sparking tools. Take precautionary measures against static discharge. Wash face, hands and any exposed skin thoroughly after handling Use only outdoors or in a well-ventilated area. Wear protective gloves/protective clothing/eye protection/face protection. IF ON SKIN (or hair): Remove/Take off immediately all contaminated clothing. Rinse skin with water/shower. IF INHALED: Remove to fresh air and keep at rest in a position comfortable for breathing. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Call a POISON CENTER or doctor/physician if you feel unwell. If skin irritation occurs: Get medical advice/attention. Wash contaminated clothing before reuse. In case of fire: Use CO2, dry chemical, or foam Dispose of contents/ container to an approved waste disposal plant