Cookies disclaimer

I agree Our site saves small pieces of text information (cookies) on your device in order to deliver better content and for statistical purposes. You can disable the usage of cookies by changing the settings of your browser. By browsing our website without changing the browser settings you grant us permission to store that information on your device.

40469 Tetrakis(diethylamino)titanium(IV), 99.99% (metals basis)

CAS Number
Titanium diethylamide

Stock No. Size Price ($) Quantity Availability
40469-09 10g 165.00
40469-18 50g 640.00
Add to Cart Bulk/Specialty Print Quote View Item

Tetrakis(diethylamino)titanium(IV), 99.99% (metals basis)


Chemical Properties

Formula Weight
Boiling Point
Refractive Index
Storage & Sensitivity
Moisture Sensitive. Air Sensitive. Ambient temperatures.
Reacts with air.


Used as nitride precursor - MOCVD. Precursor to Titanium nitride (TiN) thin films, chemical vapor deposition (CVD). A novel templated non-hydrolytic sol-gel synthesis of titanosilicate xerogels is reported. Acetamide elimination from silicon acetate and titanium diethylamide allows obtaining titanosilicates with a high content of Si-O-Ti bonds but low surface areas. Metal-organic chemical vapor deposition (MOCVD) of TiN thin films at low temperatures and low pressures using tetrakis(diethylamino) Ti (TDEAT) and NH3 is described. TDEAT dissociatively chemisorbs on SiO2 at room temperature or above, resulting in Ti?N bond scission, and Ti?O bond formation.


Air & Moisture Sensitive. Store in cool place. Keep container tightly closed in a dry and well-ventilated place. Handle under dry protective gas. Store away from strong oxidizing agents, air, water, light, alcohol.

Literature References

J Tong, N Magtoto,; J Kelber. Tetrakis(diethylamido) titanium (TDEAT) interactions with SiO2 and Cu substrates. Applied Surface Science. year of publication , 220 (1-4), 203-216.

T.S. Cale,; M.B. Chaara,; G.B. Raupp,; I.J. Raaijmakers. Kinetics and conformality of TiN films from TDEAT and ammonia. Thin Solid Films. 1993, 236(1-2), 294-300.

GHS Hazard and Precautionary Statements

Hazard Statements: H225-H315-H319-H335

Highly flammable liquid and vapour. Causes skin irritation. Causes serious eye irritation. May cause respiratory irritation.

Precautionary Statements: P210-P233-P235-P240-P241-P242-P243-P264b-P271-P280-P303+P361+P353-P304+P340-P305+P351+P338-P312-P332+P313-P363-P370+P378q-P501c

Keep away from heat/sparks/open flames/hot surfaces. - No smoking. Keep container tightly closed. Keep cool. Ground/bond container and receiving equipment. Use explosion-proof electrical/ventilating/lighting/ equipment. Use only non-sparking tools. Take precautionary measures against static discharge. Wash face, hands and any exposed skin thoroughly after handling Use only outdoors or in a well-ventilated area. Wear protective gloves/protective clothing/eye protection/face protection. IF ON SKIN (or hair): Remove/Take off immediately all contaminated clothing. Rinse skin with water/shower. IF INHALED: Remove to fresh air and keep at rest in a position comfortable for breathing. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Call a POISON CENTER or doctor/physician if you feel unwell. If skin irritation occurs: Get medical advice/attention. Wash contaminated clothing before reuse. In case of fire: Use CO2, dry chemical, or foam Dispose of contents/ container to an approved waste disposal plant

Other References

Hazard Class
Packing Group
Harmonized Tariff Code


  • 00262

    Platinum foil, 0.025mm (0.001in) thick, 99.9% (metals basis)
  • 10261

    Niobium foil, 0.127mm (0.005in) thick, annealed, 99.8% (metals basis)
  • 10265

    Niobium wire, 0.25mm (0.01in) dia, 99.99% (metals basis excluding Ta)
  • 13783

    Vanadium foil, 0.127mm (0.005in) thick, 99.8% (metals basis)
  • 42932

    Tetrakis(dimethylamino)titanium(IV), 99.9% (metals basis)

Recently Viewed


Life Science

Metals & Materials


Analytical & Labware