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Manganese sputtering target is widely used in coating processing industries like magnetic data storage application, electronic and semiconductor application. It is used also in chemical vapor deposition (CVD), physical vapor deposition (PVD) display and optical applications.
J.N Broughton.; M.J Brett. Investigation of thin sputtered Mn films for electrochemical capacitors. Electrochimica Acta. 2004, 49, (25), 4439-4446.