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Indium tin oxide sputtering target thin films have wide utility because they are electrically conductive and transparent at visible wavelengths, so it is used for coating purpose. A preferred method for making highest quality ITO coatings is reactive sputtering from targets of mixed indium and tin oxides.
Gehman, B.L.; Jonsson, S.; Rudolph, T.; Scherer, M.; Weigert, M.; Werner, R. Influence of manufacturing process of indium tin oxide sputtering targets on sputtering behavior. Thin Solid Films. 1992, 220, (1-20), 333-336.
Hazard Statements: H335-H351
May cause respiratory irritation. Suspected of causing cancer.
Precautionary Statements: P201-P202-P261-P271-P281-P304+P340-P308+P313-P501c
Obtain special instructions before use. Do not handle until all safety precautions have been read and understood. Avoid breathing dust/fume/gas/mist/vapours/spray. Use only outdoors or in a well-ventilated area. Use personal protective equipment as required. IF INHALED: Remove to fresh air and keep at rest in a position comfortable for breathing. IF exposed or concerned: Get medical advice/attention. Dispose of contents/ container to an approved waste disposal plant