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Sputtering targets commonly used to coat electronic components and electronic instruments. Due to its high electrical conductivity, copper is becoming increasingly popular for use in large-format, high-resolution TFT-LCD television sets. Copper is used as the electrode layer in thin-film transistors.
Toshiaki Okabayashi; Yuki Nakaoka; Emi Yamazaki; Millimeter- and submillimeter-wave spectroscopy of AuF in the ground Full-size image (<1 K) state. Chemical Physics Letters. 2002, 366(3-4), 406-411.
M. J. Rocke. Effects of residual gas control in relationship with sputtered aluminum film morphology and electromigration properties in fine-line very large scale integrated structures. J. Vac. Sci. Technol. A. 1988, 6(3), 1675 .