Methyltrichlorosilane is used in production of methyl silicone resins, its vapor reacts with water on surfaces to give a thin layer of methylpolysiloxane which make it a water-repellent film. A combination of methyltrichlorosilane and sodium iodide can be used to cleave carbon-oxygen bonds such as methyl ethers. It is used as a precursor for forming various cross-linked siloxane polymers. Trichloromethylsilane is the starting material for the production of pure silicon for manufacture of semiconductors and optical fibers.
Ching Yi Tsaia; Seshu B. Desua and Chien C. Chiu. Kinetic study of silicon carbide deposited from methyltrichlorosilane precursor. Journal of Materials Research. 1994, 9, (1), 104-111.
Th. Kunstmann and S. Vep?ek. Heteroepitaxy of β-SiC from methyltrichlorosilane and methyltribromosilane on Si(100) without a carbon buffer layer. Appl. Phys. Lett. 1995, 67 (21), 3126.
Hazard Statements: H225-H302-H312-H331-H314-H318-H335
Highly flammable liquid and vapour. Harmful if swallowed. Harmful in contact with skin. Toxic if inhaled. Causes severe skin burns and eye damage. Causes serious eye damage. May cause respiratory irritation.
Precautionary Statements: P210-P260u-P303+P361+P353-P305+P351+P338-P405-P501a
Keep away from heat/sparks/open flames/hot surfaces. - No smoking. IF ON SKIN (or hair): Remove/Take off immediately all contaminated clothing. Rinse skin with water/shower. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Store locked up. Dispose of contents/container in accordance with local/regional/national/international regulations.