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Nitobenzyl ester based nonionic PAGs (NIPAG 2) NIPAG 2 was prepared from 2-fluoro-6-nitrobenzyl bromide with silver sulfonate.
Ramakrishnan Ayothi; Yi Yi; Christopher K. Ober; Steve Putna; Wang Yueh; Heidi Cao. All-organic non-PFOS nonionic photoacid generating compounds with functionalized fluoroorganic sulfonate motif for chemically amplified resists. Proc. SPIE . 2006, 6513
Hazard Statements: H314-H318
Causes severe skin burns and eye damage. Causes serious eye damage.
Precautionary Statements: P280-P305+P351+P338-P309-P310a
Wear protective gloves/protective clothing/eye protection/face protection. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF exposed or if you feel unwell: